By Jumana Boussey
ISBN-10: 1417526572
ISBN-13: 9781417526574
ISBN-10: 1903996473
ISBN-13: 9781903996478
Microsystems expertise is mentioned from numerous perspectives—a overview of at present used microsystem ideas, a chain of case reviews facing significant functions, and recommendations for packaging, checking out, reliability and failure research innovations, and CAO instruments and techniques.
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Additional info for Microsystems Technology: Fabrication, Test & Reliability
Sample text
An example is given in Figure 11 [MAJ 97]. Figure 11. Metallic switch realized with surface micromachining. (a) Process flow. (b) Operating mode. (c) SEM view. [MAJ97] Micro-actuators made from titanium-nickel thin film shape memory alloys (SMA) were successfully fabricated by surface micromachining using chromium [NAK 97] or PMGI polyimide [ROC 01] as sacrificial layer. Thermal microactuator composed of nickel/gold embedded in polyimide were also fabricated, with aluminium as sacrificial material [ATA 93].
Moreover, one of the most successful MEMS device, the digital micromirror device (DMD) from Texas Instruments [DMD 01, VAN 98], used as projection system from computer video signals, are fabricated thanks to the micromachining of metal pixels on CMOS integrated circuits. 8. , "Fabrication and operation of polyimide actuators for a ciliary motion system", J. Microelectromech. , Vol. 2, 1993, pp. 146-150. , "Controlled pul-etchinh with Xenon Difluride", Tech. Digest. 1997 Int. Conf. Solid-state Sensors and Actuators, Transducers 97, Chicago, 1997, pp.
Measurement and modeling of surface micromachined, electrostatically actuated microswitchs", Tech. Digest. 1997 Int. Conf. Solid-state Sensors and Actuators, Transducers 97, Chicago, June 1997, pp. 1145-1148. [MAS 97] MASTRANGELO, "surface force induced failures in microelectromechanical systems", Tribology Issues and Opportunities in MEMS, Kluwer Academic Publishers, 1997, pp. 367-396. , "Integrated fabrication of polysilicon mechanisms", IEEE Trans. Electron. Devices, Vol. ED-35, 1988, pp.